Error Analysis And Optimization Of Micro Lens Array In Slow Tool Servo Turning

As an optical microstructure,micro lens array(MLA)has the advantages of small unit size,light weight and high integration.It can be applied to many new optical systems to achieve new functions that traditional lenses can’t achieve.It has a wide range of applications in lighting,sensing,imaging,optical communication and other fields.Therefore,in recent years,domestic and foreign research institutions have invested a lot of capital and manpower to study the structure design and machining technology of MLA.Fabrication of MLA with ultra-precision machining method has the characteristics of high precision controllability,high form consistency and micron size.Slow tool servo(STS)turning is one of the important methods for the machining of MLA.This paper mainly studies the error analysis and tool path optimization of the STS turning method for MLA,which is verified by experiments.The main research contents are as follows:(1)Mathematical description methods of MLA with different distribution modes are established,and the effects of tool path patterns and discrete methods of tool location points on the surface quality of MLA in STS turning are analyzed.Spiral tool path pattern and optimized equal arc length discrete method are selected to generate tool path.By analyzing whether each tool path produces effective cutting in MLA machining,a method is established to judge the effectiveness of tool path.The tool path is optimized by removing invalid tool path to improve the machining efficiency on the premise of guaranteeing the machining quality.(2)The influence of tool nose radius on the surface quality of turning plane and circle surface is studied.Based on the existing research foundation of STS turning MLA,the influence of tool nose radius on surface quality in circle surface turning is added to further study for the influence of tool nose radius and material properties on surface generation to establish the simulation model of micro lens surface topography.(3)Based on the above theoretical research,the simulation of MLA surface topography and tool path optimization algorithm in STS turning are realized by using Matlab.The software system of surface simulation and evaluation of ultra-precision turning is established and integrated with Bruker Wyko Vision software.The integrated system provides functions including tool path generation and optimization,machining time prediction,surface topography simulation,surface quality prediction,accuracy evaluation and analysis.The theoretical research and integrated system are validated by experimental method,and the distribution pattern of form error and surface roughness in MLA with circular distribution pattern machined by STS turning are established.The tool path optimization,influence of tool nose radius on machined surface quality and integrated system development in this paper provide efficient tool path,selection principle of tool nose radius and multi-function surface simulation and evaluation system for ultra-precision STS turning MLA.