Corrosion Resistance And Oxidation Resistance Study Of Magnetron Sputtered Metal Films

Metal films with the excellent optical,electrical and magnetic properties are widely used in various fields of microelectronics,information,energy,etc.In previous studies,more attention were given to the electrical and thermal properties of the metal thin film materials,but the corrosion resistance and oxidation resistance usually determines the life of the metal thin film devices.Therefore,systematic studies of corrosion resistance and oxidation resistance of metal films have important significance.In this paper,four kinds of 316L stainless steel,Al,Cu,and Zn films with different thicknesses were prepared by closed-field unbalanced magnetron sputtering ion planting system in different sputtering time and currents.Then the corrosion resistance and oxidation resistance of the films were measured through electrochemical corrosion tests,laboratory full-immersion experiments and oxidation experiments.And the corrosion and oxidation mechanisms of metal films were discussed combined with the XRD,the SEM,the TEM,the AFM and other microscopic test results.All the deposited films showed a polycrystalline structure,the preferred-orientation for 316L stainless steel and Al films is Fe(110)and Al(200).Al films have a quite large grain size reaches several hundred nanometers.Cu films along the Cu(111)in selected columnar crystal growth.And Zn films are polycrystalline HCP structure,along Zn(1011)plane preferential growth.As the film thickness increases,the grain size of the metal thin film 4 kinds and surface roughness of 316L stainless steel,Cu,and Zn films were increased,but the surface roughness of Al films first decreases and then,rises.Moreover,surface roughness for the four kinds of films,from small to large is Cu,316L stainless steel,Al and Zn films.The results of potentiodynamic polarization curves test,electrochemical impedance test and laboratory immersion corrosion test show that the corrosion resistance of the metal thin films is not determined by the change of film thickness,but the combined impact of the grain size,surface roughness and other factors.The influence of film grain size and surface roughness on corrosion resistance shows a competitive relationship,and the one with more competitive advantage becomes the dominant factor affecting the corrosion resistance.For different metal films which were in the same thickness,the most fundamental factors affecting the corrosion resistance is the chemical properties.In addition,the corrosion resistance of 4 kinds of metal films from strong to weak is 316L stainless steel,Cu,Al and Zn films.After oxidation experiments,combining the analysis of surface macroeconomic morphology,chemical composition and resistivity of the films,it is found that the oxidation resistance of the metal thin films is mainly effected by the reaction rate between metal and oxygen and the formation of oxidized film.In the 4 kinds of films,the oxidation resistance of 316L stainless steel films and Al films is the best,Cu film followed and the oxidation resistance of Zn film is the worst.