Development Of Simulation Software For XX Physical Vapor Deposition Equipment

In order to improve the performance and efficiency of physical vapor deposition equipment,this thesis systematically investigated the system architecture,historical data analysis method,numerical simulation and animation simulation method and system security technology of physical vapor deposition equipment simulation software.According to the operation flow of the physical vapor deposition equipment,the overall framework of its corresponding simulation software was determined.Based on the Visual C# and.NET frameworks,the client and server-side were developed using the C/S architecture.Meanwhile,the MySQL software was utilized to manage the historical data in the server-side generated in the actual operation of physical vapor deposition equipment.Finally,the software operation flow was designed through several specific function modules(data analysis,parameter optimization,animation simulation,etc.),and each module function was designed and described in detail.For data analysis,BP neural network and RBF neural network model were employed.Moreover,the intelligent algorithm was used to optimize these two networks to improve the learning efficiency and accuracy.The optimized neural network algorithm is used to learn the historical data of physical vapor deposition and then predict physical vapor deposition results with given parameters,which realize the functions of data analysis and parameter optimization.Chart control,SVG animation technology and Pro/E animation simulation technology were used for numerical,2D and 3D animation simulation of physical vapor deposition process.To ensure the security of physical vapor deposition equipment simulation software system,account password,rights management and data encryption approaches protect the security of critical system data,such as the technical information and historical data.The physical vapor deposition equipment simulation system was tested,including the connection of the server,the accuracy of the neural network algorithm and the system function.The system reliability,functional completeness and prediction accuracy of the physical vapor deposition equipment simulation software were ensured through numerous test cases.The development of physical vapor deposition equipment simulation software is of great significance to improve the efficiency of physical vapor deposition equipment,increase the deposition success rate,and reduce the waste of human and material resources in the physical vapor deposition process.The physical vapor deposition equipment simulation software developed in this paper is of great help to the prediction of the physical vapor deposition results and its related performance index and the optimization of deposition process parameters.It has certain theoretical significance and important engineering practical value.