Design Of A High Reliability Loading And Unloading Control System With A Dual-Arm Manipulation

Sapphire is the most important substrate material of gallium nitride(GaN),the third generation of semiconductor.It has a wide range of applications as well as a huge demand of market,but cannot be produced automatically.With the study of sapphire substrate’s polishing process,this paper designs a high reliability control system with a dual-arm manipulation,which can be used for the control of a multi-station grinding platform and automatic loading and unloading procedure.This paper summarizes the present research about automatic loading and unloading control system.Based on the actual processing requirements of sapphire substrates and the control system’s features and requirements,the mechanical structure of the loading and unloading dual-arm,the overall layout of the polishing control system and the key parts of the hardware are all designed and set up.Then,by using the D-H coordinate method,a kinematics model of dual-arm manipulator is established.Thus,the kinematic inverse solution is obtained and the trajectory planning is carried out.According to the trajectory records during the teaching process,the manipulator realizes a high reliability crawling movement under the guidance of several algorithms,including linear interpolation algorithm,laser distance sensor based depth correction algorithm and multi-station cumulative error correction algorithm.Besides,an emergency working mode of single-arm to replace dual-arm is realized to enhance the system reliability and reusability.After establishing a kinematics model in MATLAB Robotics Toolbox,kinematics simulation is executed and algorithm verifications are conducted.After establishing and debugging the control system,we carry out crawling test experiments to verify the correctness of the system’s software,the teaching mode process as well as the depth correction algorithm.The results show that the high reliability loading and unloading control system automatically polishes sapphire substrates with high effectiveness and intelligence.