Research On Lead Zirconate Titanate(PZT) Piezoelectric Transducer Based On MEMS Technology

Based on the micro-electromechanical system(MEMS)micro-machining technology,the processing method and piezoelectric properties of PZT piezoelectric ceramic materials are studied.The process of excimer laser patterning PZT was studied,and the effects of vacuum coating and eutectic bonding conditions on the piezoelectric properties of PZT were studied.Two kinds of transducers,vibration energy harvester and piezoelectric actuator,were fabricated.A test platform was built to test the performance of the two devices.PZT and silicon materials were processed by 248 nm KrF excimer laser,and the processing effect of excimer laser on these two materials was studied.Aiming at the problem that the traditional cutter cutting PZT diaphragm is easy to be broken and the yield is low,the processing performance of the excimer laser on the PZT microstructure is studied.By adjusting the pulse energy,frequency,scanning speed and frequency of the laser,the relationship between the laser processing parameters and the depth and width of the processed PZT and Si is obtained.PZT-Si piezoelectric sheets were prepared by using eutectic bonding technique with gold(Au)as the intermediate layer.The piezoelectric properties of PZT were weakened due to high temperature conditions during bonding,and the bonding and bonding of Au before and after evaporation were respectively performed.The capacitance and loss coefficient of the PZT piezoelectric sheets were measured.The dielectric constant of the PZT material after coating and bonding process was obtained by analyzing the change of the dielectric constant of the PZT material.The temperature-to-PZT piezoelectric properties were studied.Impact.Finally,the piezoelectric cantilever of PZT-Si composite was prepared and its piezoelectric properties were tested as the energy transfer structure of the energy harvester.PZT-Cu piezoelectric sheets were fabricated by using bidirectional conductive copper foil as bonding layer,and cantilever beam and bridge piezoelectric actuators were prepared respectively,and their driving performance was tested.