| With the rapid development of industrial technology and modern science and technology,microporous device is becoming more and more widely used in the fields of aviation,electronics,instrumentation,biomedical,textile and other industrial applications.Digital microscopic image measurement is an important non-contact microporous aperture measuring method.However,Influenced by microscope resolution,the original image is difficult to directly meet the demand of direct measurement.Furthermore,affected by the convolution,the microstructure's image edges and the microstructure's physical edges are inconsistent.Therefore,to establish accurate edge microstructure criterion,and to achieve the precise determined physical edge of the microstructure from the optical image is the key point to improve the ordinary optical microscopy imaging measurement.In this paper,0.550?m monochromatic light source is used in the microscopy imaging of micro round hole structure to obtain the high quality original image,and then use super resolution restoration algorithm to obtain the super-resolution image with the diffraction effect eliminate end and the image resolution of round hole structure improved.By the mean of image super resolution restoration,this paper established the micro round hole edge criterion of I_E=0.399.The criterion are helpful to detect the hole edge precisely and then to improve the micron order round hole diameter optical microscopy measurement accuracy.The method realizes the quickly and accurately microscopy image measurement of the round hole structure.Based on the above research,automatic detection system for nuclear track-etched membrane precise detection and accurate pore diameter measurement is developed for nuclear track-etched membrane's production testing and has the advantages of low cost,precision meet the need of product quality analysis,fast and easy to use.This method also can be used in various micro hole structure samples such as pinhole diameter measurement. |
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