Experiment And Mechanism Research Of Material Removal In Fluid Jet Polishing

Fluid Jet Polishing has become one of the most potential ultra smooth surface processing technology,because it can get the atomic roughness and non-damage surface,etc.But FJP is still in research stage at present,and some problems have not been resolved,for example,the amount of material removal is small,the removal mechanism is not clear,etc.For this reason,this paper intends to study the influence of various process parameters on material removal in FJP and gets the material removal mechanism.Besides,this paper will explore new ways and methods to obtain high removal rate and good surface quality,and try to apply the technology in super precision optical mirror processing.First,this paper independently setted up FJP experiment machine,which can realize the maximum jet velocity of 80 m/s and can adjust the jet velocity.Nozzle and the workpiece surface can realize relative motion of four freedom degrees,the testing machine satisfy the requirement of experiment.This paper researched the influence of process parameters and solution properties on the material removal inFJP.Experimental results showed that the material removal amount along with the augment of jet velocity and particle size increases monotonously,material removal amount is nonmonotone change as the change of jet Angle and particles concentration.When other experimental conditions are the same,the effects of jet velocity,particle size and particle concentration on the diameter of maximum removal are small.Beyond that,this paper finds the material removal volume is mainly affected by the material removal depth.Furthermore,this paper studied the material removal mechanism combining experiment and simulation in FJP.Results showed that the working surface particle collision frequency distribution acquired by FLUENT and the material removal distribution has a certain similarity,thus this paper deduces material removal is caused by impact of particles;Further basing on the calculation of removal atomics number caused by a single particle collision,this paper found that the material removal mechanism related to the particle size.When the particle size is nanometer level,material removal mode is chemical adsorption removal of single atom;When the particle size is micron level,material removal method is block "bombardment".The research of FJP process parameters and removing mechanism in this paper is not only can help reveal the new mechanism and new rule of ultra smooth surface processing in academic,bue also can help guide on the application of FJP process,so as to improve the quality and reliability of products.