Research On Deterministic Processing Technology Of Ion Beam Figuring

In recent years,industrial processing technology has developed rapidly.Deterministic processing has become increasingly important in optical processing.Its process requirements play a key role in production efficiency.Modern precision optical systems require very high precision parts,and their processing methods also require high stability and high precision.Compared with other deterministic processing technologies.Ion beam figuring(IBF)technology with higher processing precision and better figuring effect is more suitable for precise figuring of optical components than other deterministic processing technologies.In this paper,ion beam is used to realize the deterministic figuring of optical elements and solve the the fitting of the ion beam removal function,the solution of dwell time in ion beam figuring and the prediction of the simulation processing quality.Combined with the relevant data,the overall scheme of ion beam figuring technology research was designed.Firstly,staring with the removal function of the ion beam figuring,the material removal data is obtained by the point etching experiment.Gaussian fitting of the experimental material removal data is performed by least squares method to obtain fitting parameters to determine the removal function in actual processing.Fourier transform method,constrained least squares filter restoration method and iterative solution method are used to program the algorithm to carry out the study of the dwell time in the ion beam process.Calculating the dwell time for the sample surface deviation data and analyzing the surface deviation after simulation processing according to the dwell time calculation result.It is concluded that the iterative solution method is superior to the other two algorithms in terms of deviation convergence rate and computational efficiency.On the basis of determining the required functional modules,the paper designs the simulation operation interface using MATLAB software according to the specific requirements of simulation processing.Finally,the dwell time results of the calculation of the sample profile deviation deviation by the iterative solution method is loaded into the ion beam figuring equipment.The experimental sample is processed to realize the experimental test of the ion beam figuring process.Verified by processing experiment,the PV value of the sample converges from 215.729 nm to 32.290 nm,which can meet the requirements of deterministic figuring of ion beam.It has the advantages of good stability and high accuracy.