Study On The Preparation And Dielectric Properties Of Lithium-aluminosilicate Photosensitive Glass-Ceramics

Photosensitive glass-ceramics is a new type of functional glasses that can be lithographed,the microstructure can be fabricated on its surface or inside by UV exposure and wet etching.The photostructural property of photosensitive glass-ceramics makes it used in the fields of integrated circuits,inkjet printing,and biological analysis and so on.With the development of IC applications,dielectric properties have become one of the main factors limiting the development of photosensitive glass-ceramics.The regulation of the dielectric properties of photosensitive glass-ceramics has become a hot topic at home and abroad.In chapter 3,it combines the intrinsic relationship of glass composition-structure-performance,and the influence of the design of glass base components on the dielectric properties of photosensitive glass was systematically studied,and the corresponding experimental verifications were carried out.The dielectric constant and dielectric loss of the samples were measured by the network vector analyzer and the measuring instrument.IF and Raman spectra were used to analyze the structure of the glasses.The ultraviolet absorption and crystallization were studied by Uv-vis spectroscopy and XRD.It was found that the dielectric constant and dielectric loss of the photosensitive glass-ceramics were proportional to the molar ratio of K/Na.With the decrease of the molar ratio,the glass structure tended to densify and the polarization and relaxation of ions reduced.When the molar ratio of potassium to sodium was lowest,that is,there was no K₂O in the components,the dielectric constant and dielectric loss were optimal,which were 4.9 and 4.9×10^-3（1 GHz）,respectively.What’s more,when the doping amount of Al₂O₃ was 2 wt%,there was the minimum dielectric constant and dielectric loss,which was 5.0 and 4.8×10^-3（1 GHz）,respectively,which was related to the larger volume of[AlO₄]^5-.And the introduction of B₂O₃,CaO,MgO,BaO and Gd₂O₃ had a small influence on the dielectric properties,and the regularities were not obvious.Through the photosensitivity verification,R0 and A2 glass formulations optimized the dielectric properties of the glass without losing their photosensitivity.In chapter 4,the effects of heat treatment process on the dielectric properties of photosensitive glass-ceramics were systematically studied.The dielectric constant and dielectric loss of photosensitive glass-ceramics gained by one-step crystallization processing were studied by using dielectric measurement instrument,XRD,SEM and so on.The effects of heat treatment temperature,heat treatment holding time and heating rate on the glass-ceramics phases.The experimental results showed that the dielectric constant can be reduced by increasing the heat treatment temperature and treatment holding time,but the influence of the above two parameters on the dielectric loss was not obvious.On the whole,the dielectric constant and dielectric loss of crystallization samples obtained by heat treatment was lower than the glass sample.In consideration of the buckling of the glass,the sample,which was heat treatment at 830℃and without heat preservation treatment for a long time and with the heating rate of1℃/min,had the optimal valves of dielectric constant and loss,and the dielectric constant and dielectric loss were 6.5 and 3.0×10^-3（20 MHz）,it was far better than the untreated glass sample in dielectric properties,and the dielectric constant and loss of the glass sample were 7.6 and 5.5×10^-3（20 MHz）,respectively.And the flexure strength reached a better valve at 128.4 MPa.