| Electrochromic materials and devices have a wide application prospect in the fields of energy-saving window,electrochromic window,military camouflage etc.Tungsten oxide（WO3）were often used as main inorganic electrochromic material.Most studies were focused on a single property merely.but the comprehensive performance such as the cycles life,optical modulation amplitude and response time etc has received less attention.By magnetron sputtering which has been widely applied in industry,we have prepared tungsten oxide（WO3）electrochromic thin films and emphatically discussed the influence of process parameters on the simples,electrochromic properties.The main experimental results are as follows:（1）When oxygen argon ratio increased from 0.1 to 0.2,the valence state of tungsten were+6,electrochromic performances were improved significantly:color efficiency reach 36 cm2/C,optical modulation amplitude increased to 62%,fade time was 58 s.With the increase of the oxygen content,the oxygen argon ratio further increased from 0.2 to 0.86,fade time reduced to27 s.（2）When the deposition pressure increased from 1.0 Pa to 2.4 Pa,color efficiency increased from 5.70 cm2/C to 37.4 cm2/C,optical modulation amplitude increased from 4.80%to 62%,fade time reduced from 122 s to 27 s.（3）When the film thickness increased from150 nm to 300 nm and 600 nm,optical modulation has improved by the film,s thickening.At the same time,fade time also increased,so the best film,s thickness was about 300 nm.（4）When the substrate temperature is 100℃,the durability of tungsten oxide films is best,Optical modulation amplitude of 42.4%for the first time;after the loop3000 times,optical modulation amplitude is 27.3%.keep 64.5%of the initial value at550 nm wavelength.（5）With the increase of charge injection,optical modulation amplitude were increased.But when the injected charge increases to a certain value,optical modulation amplitude were closed to saturation.When the injected charge value is 10mC/cm2,optical modulation amplitude is about 40%45%.When the injected charge increases to20 mC/cm2,optical modulation amplitude is about 57%.（6）We have prepared silicon oxide on tungsten oxide film layer.it has good ionic conductivity of electrolyte,and after 100 CV cycle still has good cycle stability.（7）Titanium doped V2O5 of electrode membrane layer were prepared,anode visible average optical transmittance was 70.14%,and the cathode visible average optical transmittance was 69.53%,and the film stored charge capacity was 22.7mC/cm2. |
