Preparation And Characterization Of The Micro And Nano Standard Templates

For the existing standard templates,there are some problems such as the inconspicuous tracking structure and the difficulty in locating effective size structures.This paper will design a standard template with effective structural features and high measurement efficiency as the research focus.First,the beat frequency experiment was performed on the laser interferometer in the metrological nano measuring machine(NMM)to ensure the stability and traceability of the laser interferometer in the mobile platform.The 60 nm step height standard template with traceable structure and one-dimensional,two-dimensional grid standard templates were designed and prepared,its processing technology was studied and use the metrological NMM carries on the tracing calibration and verification.The main research and results are shown as follows:(1)The working principle and traceability of the metrological NMM were studied.The traceability of the metrological NMM with a laser interferometer was tested.According to the verification regulation of the laser interferometer,the beat frequency experiment of the three axis laser interferometer in the metrological NMM was carried out to ensure the traceability and reliability of the measurement results.The measurement experiments on metrological NMM were performed using the VLSI STS2-1000 S standard template traceable to NIST,ensuring the accuracy of the instrument's measurement results.(2)Research on the tracking structure of the standard template,a nano step standard template with standard value of 60 nm and tracking structures was designed,the semiconductor processing technology for processing standard templates was also studied.Based on the traceable metrological NMM,the processed nano step standard template were measured and evaluated,and the regional uniformity and long-term stability experiments were carried out.The experimental results show that the height value of the prepared nano step standard template is basically the same as the design value.The measuring repeatability standard deviation of the various positioning and measuring methods are less than 1 nm.The designed tracking structure can effectively assist the charge-coupled device(CCD)to achieve rapid tracking and positioning.It is proved that the designed standard templates were obvious structural features and accurate value.(3)In order to solve the problem of the process error by replacing standard templates when the nanometer measurement instruments calibrate different parameters,a cross scale and multi parameter standard template was designed and prepared.The processing technology was studied according to the size and structure of the standard template.Based on the metrological NMM,the processed standard template were measured and evaluated,and the regional uniformity and long-term stability experiments were carried out.The experimental results show that the structural parameters of the standard template are accurate.The standard template can realize the cross scale measurement of nano measuring machine on the same standard template,meet the calibration needs of different parameters,and make calibration work more convenient.