Analysis And Prediction Of Energy Consumption In Reduction Process Of Polysilicon Reduction Furnace

Reduction furnace is an important equipment for polysilicon production,and it is the most energy consuming equipment in polysilicon production.It is an important problem for the polysilicon enterprises to take effective energy-saving measures to reduce the energy consumption in the production of polysilicon.Therefore,it is of great significance and necessity to analyze the energy consumption in the process of deoxidizing furnace deposition and to study the direction of energy consumption in the process of production.The production process of reduction furnace deposition is a random dynamic process,and the energy consumption is changing at every moment,and the energy consumption of the process is uncertain.Therefore,it is of great significance to predict the energy consumption and explore the internal relationship between the influencing factors and energy consumption.In this thesis,the energy consumption of polysilicon reduction process is analyzed from various angles for polysilicon reduction furnace,and the energy loss path of the reduction process is explored.On the basis of this,the energy consumption of the reduction process is forecasted according to the stochastic dynamics of the deposition process in the reduction furnace.In order to predict the future energy consumption of the deposition process in advance.The research contents of this paper are as follows:1 ? According to the deposition process of polysilicon reduction furnace,the equipment,process flow and energy flow of the reduction furnace are analyzed systematically.The characteristics of energy consumption and the influencing factors of energy consumption in reductive deposition production are revealed.2? The ways of energy loss in the deposition process of reduction furnace are studied.The main ways are the radiation heat loss from the silicon rod surface to the furnace wall,the heat transfer loss of the inlet and outlet gas and the heat loss of the chemical reaction.According to the structural characteristics and technological parameters of 24 pairs of rod reduction furnaces,the radiation heat dissipation indifferent stages of production and deposition process was calculated by using Boltzmann radiation law.The heat transfer and reaction heat of gas in different stages of production process were simulated by ASPEN plus.It provides a theoretical basis for energy saving and consumption reduction in the deposition process of reduction furnace,and also lays a foundation for the screening of influencing factors for energy consumption prediction.3?The energy consumption prediction model of reducing furnace based on D-S(evidence theory)fusion LS-SVM(least squares support vector machine)is established.First,D-S evidence theory is used to select the energy consumption history data of similar periods as training samples,and then LS-SVM is used to train the prediction model.Finally,the energy consumption of each hour of the predicted period is predicted,and the energy consumption curve of the predicted period is obtained.Based on the above research,the model base of energy consumption prediction is established,and the energy consumption prediction module is developed by Java language.Then the module is integrated into the energy consumption monitoring system and applied in the enterprise production.