The Study Of Solid-state Nanopore Fabrication Based On Ultra-precision Positioning

In recent years,nanopore sensors have made significant progresses in the application of gene sequencing.In particular,the solid-state nanopores have become the mainstream nanopore sensor because it has good advantages in material selection,stability,and integration.Although the technology of individual nanopore fabrication is relatively mature at present,there are still many challenges of the nanopore arrays fabrication in commercial application of gene sequencing.For the problem of solid-state nanopore arrays fabrication,the position fabrication of solid-state nanopores,based on the dielectric breakdown method,has been studied by controlling the range of the electric field applied in the insulating film.This will be an original way for the fabrication of solid-state nanopore arrays.In this article,we proposed an approach to reduce the contact area between electrolyte solutions and membrane of nanopores fabrication.According to the requirements of the study protocol,an experimental platform was designed and constructed for performing nano-positioning manipulations and automatic producing solid-state nanopores.Finally,the ultra-precision positioning fabrication of solid-state nanopore was achieved in extremely small area of silicon nitride film,and the chip of tungsten disulfide nanopore fabrication was developed by using the prepared nanopores.