Nanoscale Deposition Simulation Analysis And Ruling Study Of Mechanical Ruling Grating Aluminum Thin Film

Mechanical ruling grating belong to the field of ultra-precision machining and are produced by ruling machines that ruling a large number of periodic grooves on a thick aluminum film(10-15?m)blank.The aluminum film was obtained by vacuum evaporation method,and the depth of echelle diffraction grating in 79g/mm is between 3-5?m.Affected by the vacuum vapor plating process,the deposition adsorption and growth modes of the aluminum film directly determine the internal microstructure difference of the film,which in turn leads to different mechanical properties,surface morphology,and optical reflection characteristics.At the same time,it is affected by the substrate effect,the grooving process of grating becomes more complicated.This paper starts with the formation mechanism of aluminum thin film the vacuum vapor plating,based on the first principle,using the CASTEP software package to establish the aluminum atom adsorption model,calculation the adsorption energy of different surface adsorption sites,and determine the aluminum atom deposition process is an exothermic process.In view of The phenomenon of the continuous increase in temperature during the vacuum vapor plating process,aluminum thin film samples were obtained by step by step the vapor plating process and continuous the vapor plating process.The differences in the mechanical properties?surface morphology and other aspects of the aluminum thin film samples obtained by different vapor plating processes were obtained by means of AFM,XRD,and nanoindentation tests.It provides a method and reference for revealing the growth mechanism of thick aluminum film by vacuum plating.Secondly,in view of problems of the large depth,the influence of the substrate and the complexity of the material uplift law in the mechanically ruling gratings,finite element simulation is used to simulate the pressing process of aluminum film without substrate and the pressing process of aluminum film on the substrate,and combined with the dimension analysis theory to study and obtain change rule of the rebound amount of the groove bottom and the height of the uplift.Finally,the real ruling test was performed using the aluminum film of the step by step vapor plating process,analyze the change of groove bottom angle and material uplift height of both sides of the ruling knife.This study provides a reference for further revealing the mechanism of ruling grooving and improving the quality of grooves.