Preparation And Properties Of Doped ZnO Transparent Conducting Thin Films On Flexible Substrate

Since 21st century,the traditional energy shortage and increasing seriously environmental pollution within the scope of the global,renewable energy especially solar cell industry get rapid development.In all kinds of solar cells,thin film solar cells can save energy and have a low cost and will be a hot point of current research and development.In thin film solar cells,transparent conductive film can be used as transparent electrodes and minus reflection membrane.ZnO transparent conductive film have the feature of rich raw materials,cheap,non-toxic,easy to etch and many other advantages compared with ITO films.The characteristics of easy to etch and stability in the hydrogen plasma atmosphere make this kind of thin film materials can be applied in the silicon thin film solar cells,this is one of the main reasons of the ZnO transparent conductive film been widely pay close attention.Thin film solar cell substrate had great effects on the performance and application scope in photovoltaic devices,flexible substrate material has flexible,lightweight,easy to transport,easy to large scroll production and many other advantages.With the miniaturization development of the portable device,the wide application of ZnO transparent conductive thin film on the flexible substrate beyond doubt.In my paper,we make study about co-doped elements(Ga,Ga-Zr)ZnO transparent conducting thin films(ZnO-TCO)deposited in flexible substrateb such as PI and PET.Flexible ZnO films prepared by magnetron sputtering method,and make some related testing such as X-ray diffraction(XRD),scanning electron microscope(SEM),uv-vis spectrophotometer,film thickness gauge and four point probe resistance tester.We discussed the effect in the structure,electrical and optical performance of doping ZnO-TCO deposited in flexible substrate with the change of sputtering time,sputtering pressure,sputtering power,distance between target base,doping element and flexible substrates.The same excellent properties of ZnO films prepared in flexible substrates,this conclusion can provide certain theoretical basis for the application of flexible thin film material.