Control Strategy Research Of Nano-Materials In SEM

Micro/nano manipulation system can exhibit many distinct phenomena and different characteristics of operating a nano-scale object within a nano-object oriented system.It is different from macro operation.The flexibility,reliability and efficiency of the nano manipulation system are being set higher request.Due to these properties of operating environment,the accuracy requirements of the implementing mechanism of nano manipulation is very high,which brought to a wide discussion in method of manipulation and control strategy nano-materials.According to the different needs of the end implementing agencies frequency response and the accuracy of control system,firstly,this paper chooses a nano-scale piezoelectric ceramic positioning device for the nano manipulation system.This could achieve high positioning resolution and high accuracy.The driving characteristics of the piezoelectric ceramic are studied.Moreover,according to the nano-manipulation system characteristics,this paper analyzes the dominant force affecting during the manipulation process by Matlab,which mainly composed of van der Waals force.The probe manipulation method based on van der Waals force in vacuum nano manipulation environment in SEM is studied.Then a nano equivalent model of piezoelectric ceramic driving system and Attocube positioning process is constructed.The transfer functions of piezoelectric ceramic closed loop control system are designed through the reduction.2-D fuzzy controller of nano manipulation control system is designed.Finally,the dynamic and steady-state response characteristics of the control system are analyzed by Simulink simulation system.Nano materials pushing,fixing and picking up experiments are carried out on the nano manipulation platform combined with vision and position feedback,and the experimental results are also analyzed.The experimental results verify the feasibility of the scheme.