Research On THz Array Detector And Flip Chip Technology

THz technology is applied to security imaging,high-speed communication,substance identification,biomedical and industrial quality monitoring.Large-scale array detector is one of the cores of THz imaging technology.The Nb₅N₆ THz detector contains the advantages of working at room temperature,high sensitivity,fast response and easy large-scale fabrication.The improvement of array detector performance and its interconnection with ROIC are challenges.The paper provides a design of large-scale THz array detectors and optimizes the fabrication process.After that,flip-chip was introduced,and successfully applied to the large-scale THz array detector with the ROIC.The main research is classified as follows:1.Designing and optimizing the single-pixel detector and expanding into a 32×32 pixel array.The fabrication process of the THz array detector with the ROIC is optimized.2.Certificating the fabrication in flip-chip has little effect on air bridge with simulations and experiments.Designing three iterative verified schemes for flip-chip interconnection of the array detector and ROIC,ensuring reliable interconnection and read out signal effectively.3.Analyzing the electrical parameters of the array detector before and after flip-chip,including detectors resistance,the DC bias and response,the RF voltage response.Improving the fabrication process of flip chip and supporting for rapid readout of the THz signal,even the development of the terahertz imaging technology.