Research On Optimization Of Photoelectric Performance Of AZO Films Based On Laser-induced Forward Transfer Technology

As a kind of transparent conductive oxide(TCO)film,aluminum-doped zinc oxide(AZO)film has high photoelectric performance.And because of its rich raw materials,high stability,easy etching and doping,non-toxic,and other advantages,it has received much attention,and is expected to become the most powerful substitute for tin-doped indium oxide(ITO)films.However,the traditional AZO film has been unable to meet people's increasingly higher photoelectric performance requirements,and thus various film surface treatment technologies and multilayer film manufacturing technologies have rapidly developedBased on this,this paper transferred the silver film through LIFT technology,and deposited silver material on the surface of the AZO films to improve the comprehensive photoelectric performance of the film.The transfer mechanism and the experimental results are studied from both theoretical and experimental aspects.Our main work includes the following two parts1.The interaction mechanism between laser and metal materials is studied One-dimensional and two-dimensional dual-temperature models are established,and the temperature in the silver film under the action of picosecond and nanosecond single pulse laser is numerically simulated.The relationship between film ablation threshold and film thickness is revealed,and the effects of laser parameters and film thickness on the transfer mechanism are analyzed.It can be obtained that when the thickness of the film is small,the transfer of the film is in the form of liquid or gas at the same time;when the film is thick,the transfer of the film is carried out by melting the upper layer or vaporizing the material to break through the bondage of the lower layer,and The state of the transfer film is determined by the laser energy.It can be obtained that when the thickness of the film is small,the transfer of the film is carried out in the liquid or gaseous form at the same time;when the film is thick,the transfer of the film is carried out by the upper layer of molten or vaporized material breaking through the lower layer of material.At the same time,the thermal effect of the thin film under the action of multi-pulse laser and high-repetition frequency laser scanning is also studied.It can be found that the multi-pulse cumulative effect will lead to a decrease in the ablation threshold of the film.By establishing the laser scanning model calculation,it is found that the pulse accumulation effect will not occur during the picosecond laser scanning used in the experiment2.The picosecond laser was used to transfer 30nm,50nm,100nm and 200nm silver films to AZO film,and obtained AZO films with improved photoelectric performance.The relationship between the photoelectric performance of the Ag-AZO film and the Ag film thickness,the laser energy was studied.The experimental results show that:(1)When the film thickness of the silver film is 30nm and 50nm,a large amount of silver nanoparticles were deposited on the surface of the AZO film According to the scanning traces,the particles follow the distribution of more on the sides and less on the middle.With the increase of laser energy density,the average visible light transmittance of Ag-AZO thin films generally shows a downward trend,but it has increased in a small range,and the square resistance has continued to decline.When the laser energy is too high,the film is destroyed;(2)When the thickness of the silver film is larger than 100 nm,the AZO film with improved photoelectric performance cannot be obtained.When the laser energy is low,the silver film is observed as a stripe deposit on the receiving end film.With the increase of the laser energy,the strip-shaped deposition structure disappears,and a larger-sized silver nanoparticle cluster structure appears,and when the thickness of the silver film at the transfer end increases,it can be observed that the nano-cluster turns into a nano-rod,and presents a distribution similar to a network structure;(3)Compared to the single transfer,the number of nanoparticles deposited on the AZO film is larger and the size is larger when the transfer is twice,but the increase in the conductivity of the Ag-AZO film is not enough to compensate for the decrease in light transmittance.The overall photoelectric performance has not been improved.