| The rapid development of high-end manufacturing equipment is increasingly demanding the calibration technology for machine tools and coordinate measuring machines.As one of the core technologies of high-end manufacturing equipment,laser tracking measurement technology has become a key technical problem that needs to be solved urgently.It puts higher requirements on the measurement accuracy of laser tracking measuring instrument as a calibration instrument.The purpose of the research "Air refractive index compensation method for laser tracking measurement system" is to study a high-precision laser refractive index measurement system air refractive index compensation method based on laser tracking measurement.The research of this subject provides a technical reserve for the realization of high-precision laser tracking measurement technology,and has broad application prospects in the field of precision industry and engineering.(1)Research on air refractive index compensation method for laser tracking measurement systemBased on the principle of laser tracking measurement,this paper analyzes the air refractive index error caused by environmental factors in the interferometry process of laser tracking measurement system,investigates the research status at home and abroad,and analyzes the advantages of various air refractive index compensation methods.Insufficient,laid the foundation for the proposed method of air refractive index compensation for laser tracking measurement systems.(2)Software and hardware design of the compensation systemThe hardware circuit design of refractive index compensation system for laser tracer based on FPGA and DSP is completed,including the power module,the environmental parameter sensor multi-channel data acquisition module,the FPGA logic control module and the serial communication module.The FPGA-based serial port data transmission program for the host computer and the parallel port data transmission program for the external DSP chip are designed.The data acquisition software of the upper computer based on LabVIEW was written by G programming language.(3)Experimental analysisFinally,the simulation experiments and experimental verification of the air refractive index compensation system are carried out,including: the acquisition circuit of the designed air refractive index compensation system is tested,the experimental data is analyzed and processed;the system joint adjustment experiment is carried out.The experimental results show that the system can complete the real-time acquisition of the refractive index of the air,and can compensate the laser interference displacement measurement results of the laser tracking measurement system.The comparative experiment is carried out,and the results of the refractive index of the air measured by the Michelson interferometer are compared with the air studied in this paper.The measurement results of the refractive index compensation system are compared to verify the correctness of the air refractive index compensation system studied in this paper.The measurement uncertainty of the system is analyzed. |
