Femtosecond Laser Manufacturing Of Functional Components Of Micro/nanorobots

In the 21 st century,where the words "Artificial Intelligence","5G",and "Autonomous Driving" are full of technological sense,robots,the human friendly assistants,have also ushered in the golden age of development and industrialization,as an important branch of robots ——Micro-nano robots will also play an important role in future human society.After the concept of micromechanics was put forward in the 1860 s,micro-nano robots sustained to develop.Theoretical concepts were continuously improved and proposed,various preparation processes and actuation strategies were in full bloom.Moreover,many micro-nano robots have provided new solutions for people in the fields of biomedicine,environmental monitoring,and automation control.Micro-nano robots are composed of multiple systems.First,the micro-nano robot acquires image information at the micro-nano scale which depends on the vision system.Then the micro-nano robot needs to rely on the actuator to complete various functions such as grabing,releasing and transfering.The two essential components of micro-nano robots-vision components and actuator components,have great significance in the future applications of robots.This dissertation focuses on these two components,and this work will be introduced as follow:(1)In nature,most arthropods have a visual organ called compound eyes.The compound eye structure has unique optical characteristics: small size,large field of view,large depth of field,and high sensitivity to moving objects.Because of these characteristics,artificial bioinspired compound eye structure has important application prospect in the vision imaging of micro-nano robots.The femtosecond laser direct writing(Fs LDW)technology has become an important method for fabricating artificial bionic compound eye due to its unique advantages in 3D preparation,programmable design and high-precision manufacturing capabilities.However,Fs LDW technology relies on a point-by-point scanning method,which results in very low manufacturing efficiency.This low efficiency also makes it difficult for artificial bionic compound eyes to be quickly prepared in batches.In view of this problem,we propose a new scheme: Fs LDW technology is adopted to prepare the templates(SU-8)of 7-eyes and 19-eyes 3D bionic compound eye,and polydimethylsiloxane(PDMS)soft lithography technology is employed for efficient preparation of artificial bionic compound eyes.The 3D SU-8 template of bionic compound eye obtained in the experiment can be used to transfer and prepare PDMS bionic compound eyes more than 50 times,and the preparation efficiency is increased by nearly 20 times.PDMS bionic compound eyes show good focusing and imaging performance,and the field of view can reach ~ 120 °.This strategy is of great significance for the rapid,large-scale manufacturing of 3D bionic compound eyes and related optical devices,as well as practical applications in the future.(2)When micro-nano robots need to achieve specific functions,they basically rely on actuators to perform specific actions.Current actuators have characteristics such as low degrees of freedom,single functions,and weak controllability.In actual operation,the degree of functions completion is not very high.In this experiment,a new method is proposed to design the actuators of the micro-nano robot: By using the organic polymer polybutyl methacrylate(PBMA)that has solvent response characteristics and the photo-crosslinking gradient network of the cantilever,grasping function can be realized.PBMA is doped with magnetic nanoparticles to achieve precise magnetic field manipulation.Micro-nano actuators can perform a wide range of tasks with high degrees of freedom through connection devices such as springs with larger degrees of freedom.The stable,high-degree-of-freedom,multi-function micro/nano actuators reveal great potential in the grasp of the target object and controlled release at the desired position.In this experiment,a high-degree-of-freedom,stable-control,multi-function micro/nanorobot actuator component was prepared.In addition,with this structure as an example,we can simply implement a variety of functions by simply modifying the design of the structure,which is highly instructive for future studies.