The Application Of Capacitively Coupled Plasma Discharge In Nanomaterials Processing

Plasma exists in the universe with its unique state different from solid,liquid and gas,and has been widely applied in various fields,for example in the chip etching,micro mechanical manufacturing and nanomaterials processing.The various kinds of applications due to the low temperature plasma's good handling,chemical activity and the ability to obtain the high-energy activated particles and radical at low temperature.The energy and the flux of the ion bombarding the substrate change with the plasma discharge parameters.It is better for plasma to process the material that regulating the discharge pressure and power can easily control the energy and the flux of the charge particles in plasma.The data analysis through the finite simulation of the capacitively coupled plasma discharge shows that improving the plasma discharge frequency,discharge pressure and the RF bias can improve the plasma density,energy and flux effectively.Then,processed by the Ar plasma discharge under the different discharge conditions,the Co3O4/graphene composite shows different characterzation,the best processing condition is that the capacitiveiy coupled plasma device power is about 60 W,discharge pressure is about 5 Pa,discharge time is about 5 h.The SEM of the Co3O4/graphene nanocomposite can be observed that a large number of Co3O4 nanoparticles are implanted into graphene sheets,and the distribution of Co3O4 nanoparticles is uniform and random.The XRD of the Co3O4/graphene nanocomposite can be confirmed that relatively high phase purity of Co3O4/graphene nanocomposites has been achieved and no other impurities are present after the CCP treatment.When applied in the lithium ion battery as the anode,the nanocomposite exhibits great electrochemical performance.The reversible capacity is up to 1368 mAhg-1 at 0.1C,and maintains at 1269 mAhg-1 after 50 cycles.At high current rate(8C),the charging time can be shortened to 8 minutes,and the capacity is 187 mAhg-1.Under this high current surge,the capacity and maintain at?210 mAhg-1 even after 1000 cycles.