Improvement Of A Compact Glow Discharge System And Its Application In Galvanized Sheet Analysis

Glow spectrum analysis technology can directly analyze the composition of uniform block samples,and also analyze the depth distribution of each element in the depth direction of the coating material.It can be used in the research fields of material surface composition analysis and product quality inspection.The compact glow discharge system studied in this paper uses a portable CCD full-spectrum detector,which simplifies the structure of the instrument and is more suitable for applications in compact laboratories,material analysis departments,and school laboratories.Based on the miniaturized glow discharge experimental platform,the improvement of the sample cooling device was carried out.The optimal working parameters of the galvanized sheet samples were analyzed and the galvanized sheets of different thicknesses were selected under the optimal working parameters.The sample was analyzed layer by layer in the depth direction.When using a compact glow discharge system to analyze the samples of galvanized sheets,in order to reduce the adverse effect of high temperature on the surface of the cathode on the sputtering of the sample,the variation of the surface temperature of the cathode with the increase of RF power and argon pressure is analyzed.A sample cooling device was designed to control the cathode temperature,and the sputtering temperature was controlled within 50 ° C to improve the sputtering effect of the sample.The comparison experiments of instrumental precision before and after the improvement were carried out.When analyzing copper-based and iron-based samples,the spectral intensity RSD of Fe and Cu elements increased from 9.50% and 3.20% to 3.24% and 1.78%,respectively.At the time,the RSD value of the spectral intensity of the Zn element increased from 3% to 2.12%.In order to determine the optimal operating parameters of the galvanized sheet samples in this system,the effects of four parameters of RF power,argon pressure,integration time and vacuum on the sputtering effect of galvanized sheet were studied.The CCD spectrum detector was used to obtain the spectrum of each element in the sample under different conditions.By comparing the precision of the Zn element in the galvanized sheet under different working parameters,the optimal analysis of the galvanized sheet by the compact glow discharge system was determined.Working parameters are argon pressure 260 Pa,RF power 40 W,vacuum 0~5 Pa,integration time 100 ms.The sample cooling device was installed under the optimal working parameters,and the precision of the galvanized sheet sample was analyzed by a compact glow discharge system,and the measured data was given.The galvanized sheets with coating thicknesses of 17.5 ?m,20.86 ?m and 31.26 ?m were analyzed in real time,the types of elements contained in the samples were analyzed,and the spectral curves of Zn,Fe,C,P,Al and Si were given.Its distribution along the depth direction.