Theoretical Model And Experimental Study On Removal Function Of Small Tool Polishing With Central Slurry Suppling

The traditional small tool polishing technology of free abrasive has a high removal efficiency and good profile control ability,so that it is widely used in grinding and polishing of optical surface machining.However,the polishing pad is easy to wear and the distribution of abrasive is inhomegeneous in polishing area,which has a good effect on the stability of removal function.And these restricting its further development.In this paper,based on the esisting technology,we supplying slurry from the central of pad instead of its around,and this improvement overcome the shortcomings of traditional technology.Furthermore,we study the small tool polishing with central slurry supplying by theoretical model and experimental studies in detailed.First of all,through the experiments of the two polishing methods,we explore the discipline of removal function varies with the tool revolution speed.And we compare the two medthods from the aspect of pad wear degree,removal rate and the stability of the removal function.Secondly,starting from the production process of polyurethane pad,we analysis the character that is import to the material removal,as well as simplify the pad model,we bulid a simulation model of the pad morphology by mathematical statistics.And the experiment show that they have a lot of similarity.Thirdly,the interaction between the workpiece,glass and abrasive is studied.By simplifying some minute factors in free abrasive polishing,we bulid a simulation model of removal function.Mechanics of materials,Plane contact theory and Sliding indenter theory are used.And the experiment show that the model can forecastthe removal function shape and removal rate of small tool polishing of central slurry supplying.Finally,we established the planet optimization simulation model based on the tool rotation model.Through the reasonable design of orthogonal experiment simulation,we explore the influence of rotating speed ratio,eccentricity ratio and pad pressure to the removal function shape.With the approach factor as the optimization target,the parameter optimization of planetary motion of polishing pad is studied.This paper verify the advantages of central slurry supplying in removal function shape,stability and pad abrasion compared with supplying slurry around.Simulation models of pad rotation and planetary motion are bulided,which laid a foundation for quantitative research on removal function contour,removal rate and optimization of planetary motion parameters involving polishing pad character,morphology and abrasive particles.