Microvisual Measurement Of Laser Ablation Pattern Based On Multi-image Fusion

With the rapid development of modern technology,micro-machining technology was constantly developing into more sophisticated fields.In the field of micro-super precision in modern science and technology,it had entered the micro-nano level.Due to the rapid development of infrared and laser engineering,biological engineering,micro-nano manufacturing and other technical fields,higher standards for accurate measurement of small objects had been proposed.In the field of precision measurement,more and more attention was paid to the measurement method of micro-vision,and its advantages such as fastness,accuracy,flexibility,high degree of automation and non-contact were recognized.The micro-visual measurement of micro-scale components was carried out by multi-image fusion splicing,and the background,significance and research status of domestic and foreign research were comprehensively analyzed.The basic principles of micro-vision system were expounded.Firstly,the micro-vision telecentric lens was used to fly.The image of the array of laser ablation was acquired to obtain a plurality of spot array images.Secondly,the Harris and RANSAC operators were used to join the non-maximum suppression of ANMS to register and splicing multiple spot array images.Experiments verify that the image mosaic method can obtain a better overall image of the spot array.Then,the SSIM evaluation method was used to compare the stitched image with the original image to prove the accuracy of the stitching effect.The femtosecond laser ablation spot image was enhanced,and the spot was squarely fitted to extract the center point,and each of the two points was obtained.The pixel value between the center points was calibrated by the line pattern to the micro vision measurement system to obtain the scale factor between the pixel size and the geometric size.Finally,the pixel size and the geometric size were converted according to the scale factor to obtain a visual measurement of the spot array.Value;the error between the measured size and the actual size was obtained,and finally the micro-scale structural measurement based on the monocular micro-vision camera was realized to improve the accuracy of the physical measurement.Figure36;Table4;Reference 51.