Design Of Vibration Measuring Device And Data Acquisition And Processing Software Based On FP Interference

Optical methods using in vibration measuring which have the advantages of high sensitivity,accuracy,and long-distance measurement,show a application prospects in mechanical processing,bridge detection,geological exploration and the like.This paper proposes a vibration detection system based on the Fabry-Perot interference,which is applied to the measurement of small vibrations.The system uses the linear array CCD to obtain the interference fringes reflected by the FP interferometer,the factors of the vibration signal are obtained by analyzing the motion state of the interference fringe,according to the algorithm proposed in the paper,then the restoration of the vibration signal can be done.In this thesis,the research of vibration measurement based on optical methods at home and abroad is summarized and analyzed,and the principle of asymmetric parallel plate double beam interference is studied.A small vibration measurement scheme based on FP interference is proposed.Then,according to the design scheme,the selection,construction and improvement of the experimental system are carried out.The paper designs a CCD acquisition software based on LabVIEW to realize the dynamic measurement of interference fringe movement.The software collects the loop and delay time for dynamic data acquisition,and realizes data acquisition control through FPGA chip,which can be used in the interference light field.The intensity distribution is output and saved in an array of intensity and distribution patterns for real-time observation and data processing.At the same time,the data processing algorithm based on the experimental system of the thesis is designed.The data collected in LabVIEW is filtered,extracted,analyzed and calculated to realize the recurrence and parameter calculation of the waveform of the small vibration signal.According to the result of data processing,the software and algorithms have achieved the expected design goals in the experiment,and can achieve the measurement of small vibrations above 5 nm.