Research On Fabrication And Application Of Micro-nano Scale Diffraction Grating

As a key component of optical information sensing,grating has important applications in the fields of spectral analysis,holographic projection,optical anti-counterfeiting and engineering measurement.The micro-nano-scale diffraction grating is closely related to the diffraction spectrum and the three-dimensional shape due to its small scale.Its structural design also involves physical,mathematical optimization and numerical calculation methods;and the chip fabrication process in the field of integrated circuits is required for experimental preparation,such as Preparation techniques such as photolithography,etching,nanoimprinting,microelectroforming,film formation and cleaning.Therefore,the micro-nano-scale diffraction grating is difficult to design and manufacture,and it is more difficult to mass-produce.With the rapid development of lithography in the field of micro-nano semiconductor device manufacturing,high-precision micro-nano fabrication of micro-nano-scale diffraction gratings has also received much attention.This paper has carried out systematic research on the theoretical design and experimental preparation of zero-order diffraction gratings.The subject matter is at the forefront of research in the field of grating manufacturing,and the following research results have been achieved:(1)A design method of micro-nano-scale diffraction grating is proposed.According to the strict coupled wave theory,multiple solutions are obtained by optimizing the design,and the optimal solution is determined by error analysis.(2)Monte Carlo simulation and process error analysis were carried out on the grating structure based on zero-order diffractive photochromic effect.The optimal grating structure parameters were determined by combining the existing process conditions.(3)The electron beam exposure,nanoimprinting,micro electroforming and moldingtechniques are used to realize the replication conversion of grating patterns between different materials such as silicon-resin-metal nickel-resin.A grating micro-scale for biological cell size measurement and a zero-order diffraction grating for anti-counterfeiting were prepared and a photochromic effect was achieved.(4)The manufacturing method of the micro-nano-scale diffraction grating studied in this paper has not been reported in the literature.The research results have been submitted to apply for a national invention patent,and won the first prize of the 11 th Huazhong University of Science and Technology experimental technology achievement.The zero-order diffraction grating designed and manufactured by the micro-nano-scale grating has been applied to the large-scale production of anti-counterfeit packaging film of Wuhan Huagong Image Technology Development Co.,Ltd.and has produced significant economic benefits.In addition,the grating micro-scale prepared is also It has been applied to medical research on the measurement of living animal cell size in Tongji Hospital.