Complete Contactless Air Flotation And Positioning Control

With the continuous development of science and technology, the world has entered the electronic infor mation industry dominated by the new economic era, the electronic inform ation industry gradually become the mainstay of the national economy . Semiconductor technology is the core of the electronic info rmation industry, the corresponding semiconductor wafer, solar panels, LCD panels and other basic components of the dem and is also greatly increased. Because the semiconductor material itself is fragile and easy to crack, the transmission process of the basic parts such as semiconductor wafer is an important part of the production process. The traditional way of handling directly contact the product surface, which can easily cause product damage to the quality of products, has been unable to meet the industry development requirements. Therefore, the non-contact mode of transport has become the most ideal alternative way of handling,and air-float transport technology by virtue of clean-free pollution,non-fever, non-magnetic, on the surface of the object of little impact on the advantages of the non-contact transport field.However, for the time being, the existing air-float non-contact mode of transport is not entirely non-contact in the real sense, and it is still necessary to restrict positioning and provide impetus through the addition of additional institutional devices. In this paper, a tota lly contactless air transport platform based on the com bined effect of static pressure gas floating and airflow viscous traction is introduced,and the transmission and positioning of the object in one dimensional direction is researched deeply by using the intelligent composite controller based on the fuzzy PID algorithm as the core.The main research contents of this topic include the following sections:1. Theoretical analysis and simulation research on the working principle of the viscous force driving of the pneumatic floating guide.The flow field model was established by using Sloidworks, and the gas-film pressure distribution and viscous force simulation were carried out in the fluent simulation software, and the flow phenomena were understood. Based on the Nawi-Stokes equation, the mathematical model of the guideway viscous force is established, and the rationality of the mathematic model is verified by com paring the simulation results.2. Design the test of air film pressure distribution and test of viscous force. By comparing the Fluent simulation results, the reliability of the theoretical model and the feasibility of the practical application are verified, and the theoretical model is optim ized, which lays a theoretical foundation for the next phase of system control.3. An intelligent com posite controller based on Bang control and fuzzy PID control is designed for the control of air flotation without contact transport. A contactless transport control system is constructed by using MA TLAB combined with the system transfer function based on the viscous for ce formula. By com paring the control effect of intelligent com posite Controller and con ventional PID controller, it is proved that the scheme of Intelligent Composite Controller as the controller of transport system is feasible.4. The experim ental equipment of the air flotation system is constructed and the control system is debugged. The hardware design of the whole control system and the software function of the control system are expounded. The performance of the controller is tested by the experimental device of the air flotation system, and the feasibility of the air flotation and non-contact Transport control system based on the combined action of the static pressure air floatation and the air viscous traction is verified.