An AG/AG Doped ZNO Conductive Film Was Prepared By High Frequency Ultrasonic Electrostatic Spraying

As everyone knows the silver with the lowest resistivity(superconducting except)and high reflectance in the visible region,and the performance of doping,is widely used in intelligent optoelectronic devices and in recent years the development of wearable devices.Magnetron sputtering is silver thin film preparation methods,but this method costs high,the preparation process will inevitably cause a waste of resources,will also appear agglomeration phenomenon,reduce the silver film adhesion with the substrate,also affect the photoelectric properties,resulting in the reduction of the good conductivity of silver.Ultrasonic spray pyrolysis method has the advantages of simple process,low cost and easy to realize large-scale production,has good prospects for development.Based on the research of ultrasonic spray heat device at home and abroad,this paper designs the instrument of ultrasonic spray pyrolysis,and improves the instrument in the process of using.By using the self-designed ultrasonic spray pyrolysis membrane instrument,analyzed the influence of substrate temperature,precursor concentration,liquid voltage and other parameters on the structure and properties of Ag thin films,analyzed the formation mechanism,and through the photoelectric experiments on Ag doped ZnO to change the properties of the film.The experiment using silver nitrate as precursor solution,polyimide as substrate prepared by zinc nitrate and silver film,six water compounds(Zn(NO3)2-6H2O)to provide zinc,silver doped thin films prepared by Zinc Oxide.Scanning electron microscopy(SEM)was used to observe the surface morphology of the films;X ray diffractometer(XRD)was used to analyze the structure of atomic space distribution inside the material.The band gap width was measured by photoluminescence spectroscopy(PL spectroscopy).Finally,the photoelectric properties of the thin films were analyzed by UV VIS spectrophotometer(UV spectrum)and resistance tester.The experimental results show that the best Ag film can be prepared by the concentration of precursor solution is 0.2mol/L,the carrier gas flow is 150mL/min,the substrate temperature is 3000?,the voltage is 20kV,the nozzle distance is 4cm,and the spraying time is 10min;When the concentration of zinc nitrate six water compound is 0.2mol/L,the concentration of silver nitrate was 0.004mol/L,namely the doping ratio of Zn:Ag=1:0.02,the substrate temperature is 300?,the nozzle to the bottom of the distance is 4cm,voltage 20kV,oxygen flux is 150mL/min,the spraying time we can obtain silver doped films with good crystal quality of Zinc Oxide 10min.The results show that the self-designed ultrasonic spray pyrolysis instrument has its own advantages and characteristics compared with similar systems at home and abroad,and can be used to prepare various doped or pure material films.Ag and Ag doped ZnO films were successfully prepared by continuous improvement of process parameters.Although the structure and properties of the thin film prepared by this instrument need to be further improved,it lays a good foundation for further preparation of more complex and high performance composite films.