Preparation And Properties Of SnO 2 -TiO 2 Composite Films Based On Nano-silicon Pore Column Arrays

The silicon nanoparticle array?Si-NPA?has a special micro/nano dual structure.On the surface,a large number of column separation rules are formed,which are easy to adsorb water molecules.The gap between the pore columns facilitates the flow of water vapor,thus speeding up the response time.Its unique structure and physical properties are ideal for the preparation of substrate materials for silicon semiconductor nanosensors.SnO2 and Ti O2 are common wet sensitive materials with good adsorption and stability.Therefore,the combination of tin,titanium dioxide and silicon nanoparticles can achieve the purpose of improving humidity characteristics.In this paper,two kinds of nano-materials are combined together to produce a new composite material with traditional technology.The humidity sensor prepared by sol-gel method has good humidity sensitivity.The concentration of Fe?NO3?3 is 0.04 mol/L,and the concentration of HF is 13.33 mol/L,which will be dried in the oven and filled with80%of the corrosive liquid.Sample SnO2-TiO2/Si-NPA issuitable for humidity detection in high humidity range.Sample SnO2_0.25-TiO2_0.75/Si-NPA is the best humidity sensitivity.At room temperature,the response of 6%RH-90%RH is about two orders of magnitude.The variation of capacitance value of other SnO2-TiO2/Si-NPA samples is an order of magnitude.Under the test condition of 1kHz,the sensitivity of the sample SnO2_0.25-TiO2_0.75/Si-NPA was the highest,about 4352.65%,and the humidity response and recovery time were 3s and 2s respectively.The wet lag is 16.98%and the sample capacitance response is slightly different.