Silicon Based Multi-Wavelength Waveguide Grating Array

With the development of information technology,the speed of Internet traffic growth is amazing,but also brings greater demand for data transmission rate.As a result,the 100 Gbps Ethernet has been proposed as the next generation of standardization,while the multi-wavelength distributed feedback(DFB)semiconductor laser array as the transmission light source is becoming more and more important.To overcome the "electronic bottleneck",all optical communication and optical interconnection have become a hot topic in both the academic field and industry.Silicon-based optoelectronic devices have become a popular research direction in the field of optoelectronic devices because of their low cost and compatibility with the mature complementary metal oxide semiconductor(CMOS)fabrication process.At present,silicon-based optoelectronic devices such as optical switches,arrayed waveguide gratings and optical waveguide modulators have been implemented on silicon on insulator(SOI).However,due to the indirect band gap property of silicon,it is very difficult to realize silicon-based light source.Bonding silicon and III-V material is one of the possible ways to realize silicon-based light source.In recent years,researchers have successfully fabricated various active devices on silicon bonded with III-V active materials,such as DFB Laser,semiconductor optical amplifier(SOA)and modulators.To realize multi-wavelength silicon-based light source,multi-wavelength Bragg waveguide grating array on Si is necessary.This thesis focused on the multi-wavelength Bragg waveguide grating array on Si.(1)The fabrication process of Bragg grating DFB laser is investigated.Electron beam lithograph(EBL)and inductively coupled plasma(ICP)etching were used to fabricate the Bragg grating with smooth sidewall on III-V chip.A 1310 nm DFB laser was realized based on the grating we fabricated.(2)A silicon based multi-wavelength Bragg waveguide grating array is designed and fabricated.To get different resonant wavelength,we adopt different width of ridge waveguide to change the effective refractive index.EBL and ICP were used to fabricate waveguide grating array.Multi-wavelength Bragg waveguide grating array operating from 1549.2 nm to 1551.6 nm with wavelength spacing of nearly 0.8 nm was realized.