Research On MEMS Reconfigurable Filter Based On SIW Technology

With the development of wireless communication technology,the frequency resources are becoming more and more serious.All kinds of electronic terminal products are changing in the direction of miniaturization,high integration,low cost and high power capacity.The high performance microwave filter is the key component of the wireless communication system.The miniaturization of microwave filter and the high power capacity can effectively improve the ability of wireless communication system to process the information.The substrate integrated waveguide(SIW)technology is a new type of transmission line structure proposed in recent years internationally,it has not only the traditional advantages of rectangular waveguide,high power capacity,low insertion loss characteristics,high quality factor,strong anti-interference characteristics,but also has the similar advantages of the planar microstrip line circuit has small volume,low profile,easy to be integrated with other circuits.Based on the substrate integrated waveguide is the basic structure of cascaded low pass high pass filter ultra wideband bandpass filter and cascade SIW resonator bandpass filter was designed,and the simulation optimization,the structure of this kind of filter is novel,good performance,and has a unique design method.The innovation of this paper lies in the substrate integrated waveguide and MEMS technology,MEMS technology combined with the band-pass filter design,and the use of high resistivity silicon substrate as the filter,to achieve the miniaturization of filters and high frequency,RF-MEMS clamped beam switch is applied to realize the band-pass filter reconstruction.This paper proposed and optimized tapered microstrip substrate integrated waveguide conversion structure,derived filter design related formulas;tight down in the design of ultra wideband bandpass filter was studied in a modified non symmetrical structure of every physical quantity of defects in the low pass filter effect,and design a high pass filter with half die substrate integrated waveguide,and two kinds of filter cascade cost in the ultra wideband bandpass filter;then design a coupled resonator bandpass filter,and in ADS software modeling and Simulation of the feasibility analysis,the final in the 3D simulation software HFSS model optimization,get meet the design requirements,the excellent performance of bandpass filter,on the basis of the research on reconfigurable filter obtained through reconfigurable filter with complete separation.Miniaturization,integration,high power is the direction of development of modern microwave filter,and the filter design of silicon integration of SIW technology and MEMS technology is the new technology represents the development direction of modern microwave filter and its application prospect will be very broad,it is worthy of further research and exploration.