Research On High Power Microwave Magnetron Power Supply

In recent years,microwave plasma technology has been used more and more in industry and production.It has attracted people's attention for its high electron temperature and electron density,high ionization,wide working pressure range and non electrode pollution.And it has been widely used in chemical vapor deposition,plasma surface treatment technology and so on.As a result,microwave plasma technology has unparalleled advantages over other traditional technologies.But at the same time,as the core part of microwave plasma equipment microwave power supply,the instability of its output power is always restricting the development of microwave plasma technology.Therefore,the research and design of a stable performance and high reliability microwave power supply,not only has great scientific and application value,but also has high commercial value.Therefore,the main purpose of this paper is to study and design a high stability microwave power supply.Firstly,the general situation of plasma and the structure of plasma equipment are described,and the function of each part of the equipment structure is explained.Then the overall hardware design scheme of microwave magnetron power source,the scheme is mainly composed of magnetic field power supply,power supply,electric filament power supply with peripheral three parts and other auxiliary circuits compose the microwave magnetron power source hardware.The control part adopts fuzzy PID algorithm,the control effect of this algorithm on complex and difficult to model the controlled object has the better control effect,through the simulation platform on Matlab/Simulink analysis and verification results show that this algorithm has strong robustness and good dynamic response.The software of the microwave magnetron power supply is completed under the platform of ATmega16 L single chip microcomputer,and the microwave output power can be continuously adjusted in the range of 0-10 kW.And in the final stage of the experiment and debugging through,verify that the SCM system can provide a stable working environment,and can improve the microwave magnetron power output power stability and reliability.The magnetic field interference in the microwave magnetron power source in the working environment,this paper presents asuppression and attenuation of conducted EMI filter design,this design aims to influence the interference caused to elements of the whole system of high frequency electromagnetic suppression.Finally,through the simulation of OrCAD,a better three-terminal passive filter that can suppress noise interference is obtained.In this paper,the hardware design and control scheme are analyzed and studied,and a new reference scheme for obtaining high-power microwave magnetron power supply is proposed.It is believed that on this basis,through further exploration and improvement,a more stable,stable and safe magnetron microwave power source will be obtained.