Design And Optimization Of Micro-gyro Interface Detection Circuit For Ball Disc Rotor

Gyroscope sensor is a kind of device used in inertial space,which is used to detect angular displacement and relative angular velocity.It has been widely used in military field and civil field,and has become a research hot spot of many scientific research institutions at home and abroad.In the current research on rotor gyroscope,there is still a problem that the detection accuracy is not high enough,the rotor speed is low and the processing cost is high.Therefore,the MEMS center of Harbin Institute of Technology has proposed a ball rotor type micro gyroscope with high precision,High-speed,low cost and other obvious advantages.This paper is based on the ball disc rotor micro gyroscope designed an interface detection ASIC circuit.In this paper,the micro-structure and working principle of the rotor-type rotor gyroscope are analyzed in detail.Finally,the detection circuit scheme with phase-sensitive demodulation technology as the core is determined,and the system design and module division of the whole interface detection circuit are emphasized.Circuit units behavior level design,in order to achieve the overall interface detection ASIC circuit design.In the process of ASIC circuit design,the noise detection of the detection circuit,focusing on the realization of C/V conversion circuit unit and filter amplifier unit low noise design,and sine carrier signal circuit unit automatic amplitude control design to ensure that the ASIC circuit Reduce the output noise requirements.At the same time,aiming at the phase problem of the phase-sensitive demodulated signal of the switch,the phase error of the demodulated square wave signal is adjusted by the0°~-180° phase-shifting circuit unit to improve the linearity of the ASIC circuit.This paper summarizes the requirements of the overall circuit,in the Cadence software platform to complete the detection of the ASIC circuit as a whole and the behavior of each unit module design,verify the performance of the detection circuit.From the simulation results,the detection range of ASIC detection circuit is 5×10-2pF~5×10-8pF,the relative resolution of capacitance is 1×10-8,the scale factor is57.0938V/pF,the nonlinear error is 0.021%,the equivalent output noise voltage is383.3nV/?Hz@40Hz.In this paper,Cadence Virtuoso tool for layout design,0.35?m CMOS process to complete the overall ASIC layout design,the layout area of3mm×2.85 mm,and completed the overall ASIC circuit after the simulation test,the results meet the interface detection circuit Design requirements.