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Study On Measurement And Control Technology Of Key Parameters In Gas Discharge Process

Posted on:2018-12-07Degree:MasterType:Thesis
Country:ChinaCandidate:Y Y LiuFull Text:PDF
GTID:2348330533970872Subject:Mechanical engineering
Abstract/Summary:PDF Full Text Request
Plasma discharge will be affected by different factors,such as the frequency of the power supply,discharge gas types,and discharge electrode spacing,etc.The former control mode is manual operation,and the experimental result depends on the experience of the operator,mastery of the experimental situation,proficiency in experimental operation.The experimental results are different because of the operator.In this paper,the control system of the arc electrode spacing and the atmospheric pressure RF plasma power control system are designed:(1)According to the working principle of the circuit.The researcher chooses the proper rectification,filtration and voltage stabilizing circuit,and according to the actual needs,selects the element components in the circuit,design the power supply circuit.Besides,according to the control requirements and control theory,through the comparison of different control methods,the appropriate PID parameters,the preparation of the control program is selected.(2)According to the need of the experiment,the vacuum chamber is redesigned and modified.The electrode spacing control system is designed,and the circuit board and control box are made to ensure the safety in the actual operation.Finally,the researcher studies the influence of electrode spacing on the plasma arc.At the same time,in the study,the change of current can affect the plasma arc.(3)Aiming at the objects that need to be processed in the laboratory,the researcher redesigns the structure of the atmospheric pressure RF plasma generator,and optimizes the intake structure of generator according to the demand of air input.The intake is more uniform.The researcher designs the feedback system of light intensity to control the power supply.Finally,the researcher finds that the power change does affect light intensity,under the same air intake conditions.Besides,the researcher finds that air intake can affect the intense of light under the same power.
Keywords/Search Tags:Plasma, generator, measurement and control system, gas discharge
PDF Full Text Request
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