The Research Of Structure And Characteristic Of MEMS Coplanar Waveguide Transmission Line

Microwave transmission line is generally used in the microwave band,transmitting electromagnetic energy and information,which is an important part of the microwave system.MEMS transmission line is the basis of MEMS components and assemblies and the focus of research of MEMS technology.With the development direction of the communication system turning to low-loss,low-power,high frequency,it's setting a higher performance requirements for the MEMS,the MEMS coplanar waveguide(CPW)that with miniature,low-loss characteristics becoming more and more valued.Therefore,the study of low-loss MEMS coplanar waveguide has an important significance in the future.This paper mainly researches the MEMS CPW which owns the low-loss characteristics,the main content are as follows:1.Paper describes the general situation of the development and research of microwave transmission line,analyses the equivalent circuit model and distributed parameter model of the CPW transmission line and deeply researches the electromagnetic field model and the loss characteristics of the CPW.2.Paper analysis the transmission characteristics and simulation method of the structure of MEMS CPW,deeply analysis and researches the structure of several widely used MEMS CPW.And on that basis,designs a kind of edge-suspended MEMS CPW structure which oval-shaped groove,simulates it with the microwave simulation software-HFSS and verifies the structure owning the low-loss characteristics.3.Paper analysis the loss characteristics of CPW which based on the film substrate structure,mainly researches the influence of dielectric size and substrate size on the loss characteristics of CPW and simulates and verifies it with the microwave simulation software-HFSS,summarizes the influence law that polyimide film and silicon dioxide thin films structure exert on the loss characteristics of high-resistivity silicon substrate CPW,provides a reference and example for the subsequent new structure design and loss characteristics study of CPW.The innovations are as follows:Improve the MEMS micro-shielded CPW structure and reduce the CPW loss;Design structure and achieve a low loss;Propose the analysis of characteristic impedance about edge-suspended MEMS CPW which oval-shaped groove;Summarize the influence of different material properties of thin-film structure om the loss of CPW.