Software Design Of MOCVD Inspection At Original Space System

MOCVD equipment as one of the important equipment in LED industry chain,the domestic research started late,in the in situ monitoring system especially shortage,using MOCVD in situ monitoring system as the research object,aims to design a set of in situ monitoring system of large-scale MOCVD equipment developed by Nanchang University,through the design of hardware and software development,to observation for the epitaxial film growth process,the in situ monitoring system to expand the way to provide reference.The main work of this paper includes hardware design and software development.In the hardware design,the DSP is selected as the core of the SOC system through the comparison of various chips.Then the serial communication,Ethernet communication and wireless communication are compared in three ways.Then,according to the actual demand of the equipment,the temperature signal is amplified by the programmable amplifier and the whole wave is processed.To complete the design of the hardware part.Software development mainly from the overall structure of the software,communication protocol design,database module and data processing module.Communication protocol based on TCP protocol and RS232 communication protocol were rewritten,according to the characteristics of MOCVD data transmission,to reduce the number of control words,improve the proportion of useful signals,improve transmission efficiency.The database module compares MSSQL,Fire Bird,ACCESS three kinds of different databases,based on the data processing speed and the database compatibility,choose ACCESS as the software database.The data processing module completes the data processing from the lower computer to the available data,the data selection,the visual processing and the data compression.After the completion of the above work,through the overall design of the software,a visual interface is established,which can be used in the actual production of the in situ monitoring system of MOCVD.Through the above work,completed in situ monitoring prototype system and overall debugging,debugging results,communication and data transmission rate stability,meet the technical requirements,the PC software is easy to use,clear image data,monitoring the effect is good.To meet the requirement of MOCVD equipment.Through this work,the streamlining of the monitoring equipment,reduce the MOCVD cost of equipment,optimize data processing,enhance the monitoring efficiency during the growth of epitaxial wafer,provides data support for optimization of epitaxial film growth process,was developed by Nanchang University,optimization of MOCVD equipment design reference.