Design Of Temperature And Pressure Control System In Packaging System

In recent years, with the continuous progress of nanotechnology, nanomaterials have been used in the semiconductor industry, the birth of a new packaging process,but in the field of control but no new material sintering control system. At the same time, semiconductor products in our daily life increasingly indispensable, even in some key positions play a pivotal role, the quality of semiconductor devices is essential. In the production process, the two most important factors is the temperature and pressure. Therefore, this paper presents a temperature and pressure control design for the new nano-materials packaging system.In this paper, the hardware and software design of the temperature and pressure control system in the constant temperature and constant pressure box of the packaging system are completed. Firstly, the research background, significance and the development of the temperature and pressure intelligent monitoring system at home and abroad are briefly described , And then use the ARM CortexM3 core STM32 controller designed temperature and pressure control system made a detailed introduction.In terms of hardware, this paper has made a theoretical analysis of each module and function, including power supply circuit, acquisition circuit and signal processing circuit and so on. Selected STM32F103ZET6 as the control core.Temperature sensor is used PT1000 platinum resistance temperature sensor, and the design of the temperature acquisition, heating, cooling drive circuit, to achieve temperature control. Pressure sensor with a piezoresistive pressure sensor, designed by the servo motor and servo controller to control the internal pressure of the device.In the software,the use of C language to complete the preparation of each module program. At the same time, the conventional PID algorithm and fuzzy PID algorithm are studied and applied to temperature and pressure control. The preparation of the host computer interface, through the human-friendly man-machine interface to control the temperature, pressure, and display real-time temperature, pressure curve.Firstly, the conventional PID algorithm and the fuzzy PID algorithm are simulated by Matlab. The simulation results show that the fuzzy PID control algorithm has smaller overshoot, shorter time to reach the steady state, and has strong anti-interference ability, Better control effect. The experimental results show that the designed temperature and pressure control system meet the design requirements.