Study On Metal Oxide Gas Sensitive Thin Film Element

With the current industrial agriculture,information science,environmental testing and other technologies are increasing,Gas sensors are used on wide range of applications.We are not satisfied with the overall performance of existing gas sensors.It need to improve the process and develop new materials to improve its overall performance to meet the huge challenge of the current social development.At present,there are many shortcomings of TGS components popular at home and abroad.For example,the gas-sensing layer is single and can only be operated manually.It can not realize the integrated production of automation.The sensitivity and power consumption are relatively high.This greatly limits the exploration of gas sensors,so the existing gas sensor technology must be modified.The purpose of this paper is to provide a feasible scheme for the development of new mature elements with high response time,long-term stability and high yield.In this paper,a feasible solution of photolithography process for thin film gas sensor is proposed,and the scheme of stripping film Al stripping agent and stripping film ZnO stripping agent are described.The mechanism of the sputtering process is described in detail,The effective region of the sputtering process was found to be PAr*.The existence and related concepts of PAr*are explained by estimating the binding energy of the sputtering ion collision substrate.And the performance test and results analysis of metal oxide gas sensitive components.The purpose is to provide the use of parameters for the new generation of gas sensors,and to provide reference for the development of other functional components.The gas sensitivity characteristics of the gas sensor show the relationship between the two components and the selectivity and the optimum working temperature of the components.The thickness effect of the gas sensor shows that the sensitivity and response time have the best relationship with the thickness of the gas The gas sensitivity of the element is related to the measured gas concentration,and the higher the concentration is,the more obvious the gas sensitivity is.The sensitivity of the gas sensor is the highest,and the sensitivity of the gas sensor is larger than that of the humidity,But the relative humidity when the change is small;through the experimental measurement of gas-sensing components of the temperature characteristics of the curve,proved to be related to the size of components.The test results show that the performance of the new thin film components is superior to the current popular commodity TGS components,its future development has great potential.