Research Of Hysteresis Nonlinear Compensation Method For Piezoceramic Actuated Micro-positioning Stages

Micro-nano positioning technology is widely used in precision manufacturing,biomedicine and microelectronics and other fields,has become the key technology of modern high-tech and modern industry.Piezoceramic actuated micro-positioning stages are the core device to realize this technology.However,due to the inherent hysteresis and creep of the piezoelectric ceramics,the control precision of the micro-positioning stages is reduced and the instantaneous response speed becomes slow.In this paper,the piezoceramic actuated micro-positioning stages are taken as the research object,in order to eliminate and reduce the influence of hysteresis nonlinearity on the positioning accuracy,the hysteresis nonlinear modeling and compensation method of the the piezoceramic actuated micro-positioning stages are studied respectively.Firstly,the composition of the piezoceramic actuated micro-positioning stages are introduced,and combined with the research status of the piezoceramic actuated micro-positioning stages,the research results of modeling and compensation method of hysteresis nonlinear are summarized.Then,in order to describe the hysteresis nonlinearity of the piezoceramic actuated micro-positioning stages,this paper compares and analyzes the advantages and disadvantages of various hysteresis models.Finally,the KP static model is adopted to describe the piezoceramic actuated micro-positioning stages.Cuckoo search algorithm,particle swarm and cuckoo hybrid optimization algorithm are adopted to identify the density parameters in the KP static model respectively,and then get a high precision hysteresis model.Because the piezoceramic actuated micro-positioning stages not only have the hysteresis characteristic but also have the frequency characteristic,its frequency characteristic is analyzed,and the KP rate dependent model is established on the basis of the KP static model.Finally,the validity of the proposed model is verified by simulation.The simulation results show that the accuracy of the model identified by the particle swarm and cuckoo hybrid optimization algorithm is higher.In order to reduce and eliminate the influence of hysteresis nonlinearity on positioningaccuracy,three control schemes are proposed.The first control scheme is the feedforward control for hysteresis inverse model compensation.After establishing the KP static model with high accuracy,KP static inverse model and KP rate dependent inverse model were established by recursion method.The open-loop control experiment of the piezoceramic actuated micro-positioning stages is carried out by using the inverse model as the feedforward controller.However,the inverse model feedforward control belongs to open loop control,can not eliminate the influence of modeling error on the system,and the anti-interference ability is poor.So PID and inverse model compound control scheme is proposed.In this control method,the hysteresis nonlinearity is counteracted by the inverse compensation,and the uncertainty is suppressed by the PID control.In order to further improve the control precision and enhance the anti-interference ability of the system,the fast terminal sliding mode control scheme without inverse model is proposed,and the global stability of the system is proved by Lyapunov function.The effectiveness of the proposed method is verified by experiments.Compared with the previous two control methods,terminal sliding mode control method has the highest control precision.