Research And Design Of On Chip Digital Temperature Sensor

In order to control the temperature of modern VLSI and various system problems caused by temperature,the integrated circuit related scholars have carried on the thorough research to the dynamic temperature management system,and the temperature sensor has become the research focus at home and abroad.Although the various types of dynamic temperature management system components are different,and has different principles,their normal work is dependent on accurately obtaining the chip surface temperature distribution.Therefore,it is necessary to design a temperature sensor suitable for dynamic temperature management system.Firstly,this thesis analyzes the principle of various temperature sensor in the traditional voltage domain temperature sensor.Then,the basic principle of the time domain temperature sensor in recent years is analyzed,and two types of temperature sensor's advantages and disadvantages are analyzed too.This thesis pointed out the temperature sensor performance indicators and the relationship between performance indicators and temperature sensor components.And then introduced the application environment of the design,which is dynamic temperature management system,and put forward the design indicators.Then the existing architecture and correction algorithm of time domain temperature sensor are studied emphatically.Then,according to the application environment of dynamic temperature management system,a time-domain digital temperature sensor with constant current pseudo-differential inverter is proposed.The simulation proves that the structure effectively suppresses the output error of temperature sensor caused by power jitter.Finally,a correction algorithm of the initial value offset caused by process and voltage deviation between multi-temperature sensors in dynamic temperature management system is proposed according to the structure of this thesis.The circuit design,simulation and verification are based on the 40 nm CMOS process.The temperature measurement range of the final temperature sensor is-40? ~ +160?,the accuracy is 0.2?,and the error range is-1.4? ~ +0.8?.Temperature sensing circuit area is only 0.0021mm2,and the total area is 0.016mm2,the total power consumption is merely 210?W,refresh rate is 60 Hz,Multi-temperature sensor calibration accuracy is ± 3?.Finally the digital back-end implementation flow of integrated circuits based on deep submicron process,including full customization and semi-customization flow,are introduced.the layout of the design is verified by DRC,LVS and voltage drop analysis.