Design On Integrated Optical Waveguide Delay Line And Application

The integrated optical waveguide plays a very important role in the fields of optical fiber communication and integrated photonics.Compared with other delay technology,the delay technology based on of integrated optical waveguide has the advantages of higher delay precision,lower transmission loss and smaller device size,So it is widely studied,becoming the most development potential of the optical delay technology platform.With the continuous improvement of optical waveguide processing technology,in the new materials,new technology has a huge breakthrough in a variety of integrated optical waveguide device applications more widely,but the design and processing of a smaller bending radius,a smaller loss optical waveguide is still very difficult.This paper is with a purpose of designing an integrated optical waveguide delay line with a smaller transmission loss and a smaller bending radius.It provides a reference design method for the design of integrated optical waveguide delay line and the realization of integrated optics.This paper firstly analyzes the working principle of integrated optical waveguide delay line.Using the finite difference beam transmission method,the 3D simulation model of buried SiO2 with refractive index difference of 0.36%,0.75% and 1% waveguide,Si3N4 ridge waveguide and SOI ridge waveguide were established by using Rsoft and Matlab software.The influence of the refractive index of the waveguide on the minimum bending radius of the buried SiO2 material at the transmission loss of 0.1dB/cm and the influence of the bending radius of the three different materials on the bending loss are analyzed.In addition,the buried SiO2 And the SOI Ridge Waveguide Interval on the Coupling Length was simulated.Then,based on the above design,an integrated optical waveguide delay line with a refractive index difference of 0.36% was designed.The device size was 6?m?6?m,the interval between the channels was 127?m,the delay time was 12.5ps,the bending radius was 22,500?m.Finally,the finished product of 1 minute 8-plane optical waveguide delay line was obtained by photolithography,coupling and encapsulation processing.The insertion loss was between 9.01 and 10.87 dB,which was consistent with the theoretical value.Finally,the insertion loss of the optical waveguide delay line at 0°C to 50°C is measured at the input wavelength of 1550 nm.The insertion loss of the 1-plane integrated optical waveguide delay line device at the wavelength of 1528 nm to 1598 nm was also measured,and the optical waveguide delay The insertion loss of the wire is independent of the temperature and the wavelength,indicating that the delay line is highly stable.