The Design And Research Of Flexible Slip-tactile Sensor Based On Pyramidal Structure

Sensors used in the robotic skin were an important medium for the intelligent robots to perceive external environment information and was the key for interaction between human and computer. A flexible slip-tactile sensor based on pyramidal structure was proposed in order to solve the low sensitivity and poor flexibility in the existing correlation slip-tactile sensor.This paper proposed a flexible slip-tactile sensor based on pyramidal structure, the key parameters influence the sensitivity and linearity of the sensor were analyzed,deformation theory of the pyramidal structure, Comsol Multiphysics simulation and experiment results show the effectiveness of the pyramidal structure in the promotion of the sensitivity of the sensor. Combination the change of the overlap area, the distance between the upper electrode and the lower electrode, the relative dielectric constant to improve the sensitivity of the sensor both in normal and shear direction,the capacitance mechanism was also analyzed. The fabrication process of electrode, dielectric layer and sensor bump of the flexible slip-tactile sensor unit and array was also systematic studied.The static characteristic experiment of sensitivity, range and repeatability was carried out of the flexible slip-tactile sensor, which all above was based on array information acquisition system of the STM32MCU and AD7147-1, spectrum analysis of the slip signal was carried out by Fast Fourier Transform, and the recognition of the slip information was realized. What's more, the sensor array structure was designed for robotics sensitive skin, the flexible slip-tactile sensor based on the Lab VIEW perception experiment was carried out. Results show that the flexible slip-tactile sensor array can realize high sensitive and stable perception, which can be used in electronic bionic skin to realize three-axial force and the detection function of slip information.