Study On The Modeling And Indentification Methods Of The Silicon Micro-Machined Butterfly Gyroscope Mode-Coupling System

Silicon micro- machined gyroscopes, which are suitable for mass, have broad application prospects in military and civilian fields, because of their small sizes, low power consumption and low prices. O f s ilicon micro- machined butterfly gyroscope, the drive- mode and detect- mode are coupled. In the research for a new control method and program to improve the overall performance of gyroscope system, this paper focuses on the micro- machined butterfly gyroscope's mode-coupling characteristics for an in-depth understanding of the controlled object in the gyroscope control system, which lay a foundation for the future work about studying on the control method and program of the mode-coupling system. O n the basis o f the study on mode-coupling characteristics of micro- machined butterfly gyroscope, the math model of silicon micro- machined butterfly gyroscope mode-coupling system is established. And a study on system identification methods is launched around silicon micro- machined butterfly gyroscope mode-coupling system. The main contents are as following:1.For a through study on the micro- machined butterfly gyroscope's mode-coupling characteristics, the mode coupling mechanism and its effect on gyroscope's performance are both analyzed. Thereafter, in the design of gyroscope system, working on the mode-coupling factors is made by necessity.2.It is analyzed that silicon micro- machined butterfly gyroscope system is a double-inputs and double-outputs mode-coupling system with an associative structure. The math model of silicon micro- machined butterfly gyroscope mode-coupling system is established, and the system transfer function matrix expression and input-output equation are both deduced.3.Using frequency response data, the silicon micro- machined butterfly gyroscope mode-coupling system is identified by estimation method of fitting. Validity and applicability analysis of the identification result proves that the fitting method cannot be widely applicable, ignoring the practical limitations and constraints of system instead of thinking only of the mathematics optimization. Thus, it's necessary to explore new methods of system identification, taking into account the actual constraint.4.Through analysis it is found that silicon micro-machined butterfly gyroscope mode-coupling system have a pair of dipole poles&zeros and a pair of conjugate main poles. Accordingly the basic configuration of the system transfer function is got. Depended on the configuration, a method of transfer function identification is given, with the advantages of close to reality, convenient measurement and simple solution. What's more, the determination method and experimental program of mode parameters and mode-coupling coefficients are both put forward for silicon micro- machined butterfly gyroscope.