Modeling Of Filter Flow Rate Machine Based On Fuzzy Neural Network

Wafer cleaning is an important process in semiconductor manufacturing. As wafer are very sensitive to micro pollutants, wafer cleaning quality is directly related to the chip finish rate, and also, the key factor to the cost of production. Wet cleaning is the popular process at present. And the key technique to wet cleaning is the master of the filter replacing. The flow and concentration of the chemicals of the cleaning machine are the criterion of.the filer replacing. In this paper the flow prediction model of the liquid chemicals in the wafer cleaning machine was build., The replacement of filters and the optimization of the production line was executed based on the prediction model. The mode solved the waste that caused by premature replacement of the filters. The model also solved the waste of the wafer which caused by the delay of the filter. The main research work of this paper is as follows:(1) Study on the working principle of the filter of wafer cleaning machine. The training sample and the test sample were selected to construct the fuzzy neural network. The collected data were standardized by noise remove.(2) Study on the modeling and learning algorithms of the fuzzy neural networks. The fuzzy neural network model was established. And an example was given to verify the prediction accuracy and error of the model. The improvement measures were put forward based on the prediction.(3) An improved algorithm of fuzzy neural model was studied. A new fuzzy clustering algorithm based on the new objective function was proposed. In order to improves the structure of the model, the algorithm introduced the input variables into the input space of the model. The fuzzy neural network structure, network parameters, weight, neurons number and rules number were determined by the improved clustering algorithm. The predict study of the flow rate of the wafer cleaning machine filter was carried out by the modified fuzzy neural network.(4) The experimental platform was built in the paper. And the paper carried out the practical test of the practical platform, including the determination of the model structure, parameter estimation and application process of the platform.Based on the theoretical analysis and practical verification, the mode of fuzzy neural network based on fuzzy neural network was proposed, which can realize automatic prediction and automatic filter replacement.