Design And Analysis Of Space 3-DOF Flexible Platform Of The Micro-manipulation

With the development of science and technology, more and more demands to the manipulation with the micron or nanoscale precision are proposed in the areas of biological medicine, precision machining and optical fiber. Because of the high precision, small in size, limited workspace, large stiffness and no cumulative error, the flexible parallel robot has a rapid development in the field of micro-manipulation. In this thesis, a 3-RPS flexible parallel robot is designed. This flexible parallel robot adopts the piezoelectric ceramic element PI80.4 produced by the German PI company as actuator, and the three symmetric branches are made up of Flexible hinges. The system integrates precision machinery, driving and detection technology, with the advantages of small volume, big stiffness, and a good ecnomy, ect.First of all, in this thesis, an outline of the development situation of flexible parallel robot, which is used in the micro-manipulation field, is given at home and abroad. On institutional design, considering the workspace of robots used in the micro-manipulation field is micron level even nanoscale, the flexible hinges which use the semi-circular flexible cantilever beam type R hinge, new structure of flexible hinge P hinge and circular S hinge as a basic component and a piezoelectric ceramics actuator are adopted in this thesis.The static FEA(finite element analysis) based on ANSYS for the 3-RPS flexible parallel robot is proposed in the thesis. The stress diagram and displacement distribution are analyzed under different driving forces. The experimental results show that this designed 3-RPS flexible parallel robot by stress is less than the maximum permissible and its space displacement for micron level. The experimental results show that this micro-manipulation robot has great potential for application in biomedical, optical fiber butt, and other fields.A matrix-vector method is adopted to analyze the positive and inverse solution of the position kinematics for 3-RPS flexible parallel robot and the input/output displacement equation of this mechanism is deduced, whose transformation matrix T is only related to the structure and the initial position and has nothing to do with the motion.The define of workspace is conducive to further determine the scope of the structural parameters of robot and to lay a good foundation for the structural design and optimization. Workspace size is restricted by maximum elongation of driven rod, angle of motion pair of conditions and mutual interference of bar and ions. The thesis is established on a polar coordinate search method to find the flexible parallel robot workspace. The result of simulation shows that the flexible parallel robot's workspace is in the range of 13.6?m×13.4?m×2?m. It meets the required micron-metre grade precision, and can be used in micro-manipulation field.Finally, elastic deformation of component and driving factors such as joint internal friction, make the system can not be accurate at predetermined trajectory. In order to improve the movement precision of flexible parallel robots, this thesis proposes a fuzzy PID controller for joint space algorithm. After doing the simulink simulation experiment for this algorithm, the experiment results show that this method is a high accuracy control algorithm and has a good tracking performance.