Research On Three-dimensional Elliptical Vibration Polishing Device

In recent years,both in the civilian industry fields such as mechanical processing and modern national defense science and technology,optical functional component shows its important application value and prospect.In order to make these components and mould,researchers always choose some materials of better physical and chemical properties which are difficult to manufacture.When processing this kind of material,the traditional machining method will have many problems,so the vibration assisted machining technology is put forward.Two-dimensional elliptical vibration polishing has proved its efficiency and huge advantage of reduce the cost in theory and practice.But for micro-structure,two-dimensional elliptical vibration polishing always can't play a role in the complex curved surface machining.Based on this background,this paper introduced a method of three-dimensional elliptic vibration assisted polishing and designed a Three-dimension flexible hinge mechanism of elliptic vibration polishing device,the main contents are as follows:First of all,this paper explained the working principle of the three-dimensional elliptical vibration polishing,analyzed the different situations of polishing path,three-dimensional elliptical vibration displacement equation was given,this paper planed the polishing path.And according to the different phase and frequency conversion,it analyzed their influence on polishing.Second,this paper designed a kind of non-resonant three-dimensional vibration device,selected the constant rectangular cross-section flexure hinge as guides,piezoelectric driver for power supply,three axes perpendicular to each other independence,driving direction is consistent with the direction of series solution.Third,with the Matrix-based compliance modeling method and ANSYS software,this paper did the flexible hinge mechanism statics analysis and modeling simulation.Two kinds of method to calculate the relative error is around 12%.Results show that the institutions of the first to the fourth order resonant frequency are 405.5 Hz,920.7Hz,979.1 Hz,1843.4 Hz.This device can meet the requirement.This paper did three-dimensional elliptical vibration polishing device test.The experimental platform was built.Decoupling,signal response and natural frequency of device was tested.Then it finished the three-dimensional ellipse trajectory simulation and polishing experiment.The rationality of the device was verified.