Optimization Design Method For Bandwidth And Sensitivity Of Multi-DOF Micro-mechanical Gyroscope

Due to the micromachined gyroscope has most advantages,such as small size,light weight,good dynamic performance,low energy consumption,low cost,high reliability,digitalization,intelligence and integration and so on.Which played an important role in MEMS and applied to the various fields,such as the automotive industry,safety protection,dynamic vehicle control,automotive safety systems,high performance navigation and guidance systems and interactive consumer electronics products.Most researchers also focus on micro-gyroscope that higher precision and more stable response.Most researchers also focus on micro-gyroscope that higher precision and more stable response.The accuracy and stability of the traditional 1-DOF micro-gyroscope can't satisfy the various needs of the society.After unidirectional decoupled and double decoupled models appear,Although the defect of the resonance frequency needs to be strictly matched and quadrature error has been improve,but did not enhance the accuracy and robustness of the micromechanical gyroscope in the true sense.Increasing the number of degrees of freedom is one suitable method for increasing the sensitivity of micro-gyroscope.Because of lots of elastic beams and vibrator masses,it is very difficult to select structural parameters.In order to make a large number of structural parameters to achieve the best match,under the premise of obtaining the ideal bandwidth,To obtain a high stability and high sensitivity of the micro-gyroscope,A fully coupled 2-DOF-sense mode micro-gyroscope is studied in this paper for the optimal design method of multi-DOF micro-gyroscope.In this work,an optimization method is proposed based on feature extraction and orthogonal experiment.Firstly,the qualitative analysis the effect of system oscillator Mass ratio,structure frequency ratio and damping ratio on sensitivity and bandwidth of micro-gyroscope in the sense direction.On the basis of qualitative analysis.To extract the dynamic characteristics.Obtained the effect of rule when the change of design parameter.Then used the orthogonal experimental method to analyze the selected characteristic parameters by multi-factor and multi-level to optimize the sensitivity and bandwidth of the micro-gyroscope.The sensitivity of the micro-gyroscope is only slightly improved compared with that of the quadratic programming algorithm,but the bandwidth is indeed increased by 1590 Hz.In order to solve the multi-objective optimization problem of the micro-gyroscope,and to solve the limitation of the orthogonal experimental method that artificially selecting the weighting factors leads to the difficulty of determining the optimal results.The sensitivity and bandwidth of multi-DOF micro-gyroscope are optimized by the combination of dynamic feature extraction,Response Surface Methodology and Genetic Algorithm.Firstly,used the method of Central Composite Designs to selected 20 test points.and then the range of control test points was extracted by dynamic characteristics.According to the experimental results,Second-order polynomials were fitted to approximate the objective function.Based on the second-order polynomial model of response surface,used Genetic algorithm to solve the multi-objective optimization problem.After a series of genetic algorithm optimization process,the results show that the sensitivity and bandwidth obtained by the optimization method compared with the quadratic sequence planning algorithm improved 19 db and 2174 Hz respectively.The improved optimization algorithm proposed in this paper can provide some theoretical basis for the optimization design of sensitivity and bandwidth of multi-DOF micro-gyroscope.Meanwhile,a novel method for based on feature extraction to determine the constraint conditions was presented.Which can provide some guidance for determination of constraints in the optimal design method of micro-gyroscope.