Research On Embedded System Of MEMS Scanning Micromirror Spectrometer

The MEMS scanning micromirror is one of the core devices that determine the stability of the long-wave near-infrared spectrometer system based on MEMS scanning micromirror.Replacing the existing unstable MEMS scanning micromirror of a resonance frequency 50 Hz by a stable MEMS scanning micromirror of a higher resonance frequency 500 Hz is an important means of improving the stability of the spectrometer.Due to the increase in resonant frequency and the requirements of the drive signals,the hardware and software architecture of the corresponding embedded systems also needs to be redesigned.In particular,the bandwidth and data acquisition rate of the relevant photoelectric conversion circuits and the data acquisition circuits need to be increased by more than ten times.The frequency of the driving signal of the MEMS driving circuit not only needs to be increased by a factor of ten,but also requires a highvoltage pulse signal having a peak-to-peak voltage of 50 V or more.To address all these problem,without changing the structure of the optical path,a 500 Hz MEMS scanning micromirror drive module,a photoelectric conversion and amplification module with an analog PID temperature control circuit that meets the system performance requirements,and high-speed data acquisition circuit have been designed and implemented.And these new circuit modules are integrated into an embedded system based on STM32F103 and FPGA technology that meets the spectrometer performance requirements.The principles and methods involved in the research work is of guidance and reference significance for achieving long-wavelength near-infrared spectrometers based on MEMS micromirror with high stability.