Study On The Prcoperties Of The Perovskite Solac Cells By Low Temperature Plasma Treatment

The efficiency of organic-inorganic hybrid perovskite solar cells has attracted much attention since 2012.In 2009,the efficiency of the device was3.8%,but now the highest certification efficiency has reached more than 22%.Spiro-MeOTAD is the most commonly used material for the hole transport layer?HTL?of perovskite solar cells.It is an excellent P type semiconductor material with high hole mobility(1×10^-51×10^-4cm²V^-1s^-1).However,the Spiro-MeOTAD layer without oxidation has higher resistivity.In general oxidation reaction is placed in the dry air for several hours after spin coating.If there is no oxidation,then the efficiency of the device is very low or almost zero.So it is important to find a fast oxidation method for perovskite solar cells.In our study,the oxidation reaction of spiro-MeOTAD layer is carried out by rapid plasma treatment.We use water and oxygen capacitively coupled plasma to oxidize the perovskite solar cell.It is obtained that oxygen plasma treatment can provide a high content of active oxygen to promote Spiro-MeOTAD layer oxidation.When the oxidation process period is 11seconds the efficiency of the device can reach 9.81%whereas it is only about0.01%for no oxidized sample.Proper amount of water in oxygen plasma can promote the crystallization of layer,and obtain more compact and uniform layer.The stability of the device has been greatly improved in the glove box or in the atmosphere environment after plasma treatment.After water oxygen plasma treatment,the efficiency of the device is about 13%.This method has great application in the practical application of perovskite solar cells,especially in the industrial flow line production.