Modeling And Simulation Of Love Wave Device Based On ANSYS And Design Of Electronic Calibration And Test Equipment

Love wave device that has the characteristics of the high sensitivity,the low power consumption,the strong anti-interference ability,has been widely used in sensors,bio-chip,and other areas.However,the love wave is a kind of sound wave which is not easy to observe and measure,and the excitation performance of different structure wave device is also different.Although the two-dimensional finite element analysis model can describe the performance of the Love wave to a certain extent,it can’t intuitively characterize the propagation characteristics of the love wave.In addition,the Love wave device testing is mainly realized by the vector network analyzer,and the time-consuming,the low efficiency,and the big wear are some main issues.On the basis of these problems above,the three-dimensional modeling and simulation of the love wave device is carried out,and an electronic calibration and test equipment structure used for vector network analyzer is designed in this dissertation.A kind of Love wave device structure is proposed in this dissertation,with the ZnO thin film as waveguide layer,and ST cut-quartz as substrate and Al electrode as metal interdigital transducer(IDT).According to the finite element analysis theory and the propagation characteristics of Love wave,the finite number of elements is used to approximate the physical structure and load of an infinite number of the real Love wave device,and the structure of Love wave device is modeled and simulated based on ANSYS.The frequencies of the Love wave device modal acoustic wave are 50.2MHz and 50.3MHz by model analysis and harmonic response analysis.At these two frequencies,the propagation of the Love wave is periodic,and the propagation and energy of the Love wave are mainly concentrated in the waveguide layer.And there is only the change of the X-direction particle displacement,and the displacement of the particles in Y-direction and the Z-direction is 0,which verifies the feasibility of Love wave device of this structure.Currently,the Love wave device is measured by the vector network analyzer,and once calibration and testing requires multiple disassemble the calibration kit and the tested device.In view of this problem,an electronic calibration and test equipment used for vector network analyzer is proposed.The electronic calibration and test equipment consists of the BNC connection module,the automatic switch module,the calibration interface module and the measurement adapter module,wherein the automatic switch module is the core of the device.The 85032 F calibration kit is selected,via the BNC connector to connect the calibration kit,the Aglient E5062 A vector network analyzer and the electronic calibration and test equipment.The calibration and test procedures are set,and the microprocessor is used to control the electronic switch,the calibration port,the calibration type,and the device under test which are selected by the electronic switch.The experiments of calibration and the calibration efficiency are designed.The experimental results show that use the electronic calibration and test equipment the average time of calibration is about 90 s.The average saving time is 210 s and the calibration efficiency is improved by about 70% compared with the conventional calibration method.The average saving time is 90 s and the calibration efficiency is improved by about 50% compared with the mechanical calibration method.At the same time,the frequency response characteristic of the two Love wave devices,which center frequencies are 50.2MHz and 50.3MHz were respectively tested.